Symposium on Vacuum based Science and Technology

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1 10 th Symposium on Vacuum based Science and Technology DIUNE Hotel *****Kołobrzeg, November 28-30, 2017 MONDAY November 27 SVC Tutorial Course - Conference room: Elegance 1 8:30-16:30 8:30 10:30 Part 1 Instructor: Ralf Bandorf, Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany From Basic Aspects to Industrial Components and Applications in HIPIMS Technology 10: Coffee break 10: Part 2 14: Part 3 Symposium on Vacuum based Science and Technology Registration of Symposium participants Welcome Reception TUESDAY November 28 Session A - Conference room: Elegance 1 Session Chair: Prof. Witold Gulbiński 9:00 9:35 9:35 10:05 10:10 10:40 10:45 11:05 Opening of the Symposium Prof. Witold Gulbinski, Symposium Chairman Welcome addresses: Prof. Anouk Galtayries, President Elect, International Union for Vacuum Science, Techniques and Applications Prof. Ryszard Czajka, President Elect, Polish Vacuum Society Prof. Michael Kopnarski, German Vacuum Society Prof. Jolanta E. Klemberg-Sapieha, Society of Vacuum Coaters Prof. Joseph E. Greene, American Vacuum Society INV1 Joseph E. Greene, Departments of Materials Science, Physics and MRL, University of Illinois, Urbana (USA) Fundamental Properties of TM Nitrides and Materials Design Strategies for Extreme Properties INV2 Ivan Petrov, Departments of Materials Science and MRL, University of Illinois, Urbana (USA) Control of Micro- and Nanostructure in Transition-Metal Nitrides and Borides: Recent Advances O1 W. Koczorowski, T. Grzela, R. Czajka, Atomic-Level Studies of Metal-Semiconductor Interactions on Ge(001) Coffee break 11:20 11:40 11:40 12:00 12:00 12:20 O2 Martin Fenker, Kerstin Petrikowski, Andreas Richter, Physical and Electrical Properties of Nitrogen-Doped Hydrogenated Amorphous Carbon Films O3 Yanwen Zhou, Yan Chen, Growth of GaN by Vacuum Thermal Evaporation on Graphene on Flexible PET O4 Piotr Myśliński, Łukasz Szparaga, Adam Gilewicz, Katarzyna Mydłowska, Anna Piątkowska, Investigations of the Thermo-Mechanical Stability of Hybrid Layers for Tribological Applications: Nitrided Layer/CrCN Coating System

2 12:20 12: :00 O5 D. Pakuła, M. Staszuk, M. Wawrzyczek, P. Kožmín, A. Čermák, Structure and Properties of Coatings Obtained by Vapour Deposition with the Laser Microstructuring O6 M. Staszuk, D. Pakuła, G. Chladek, M. Pancielejko, ALD/PVD Hybrid Coatings Deposited on Sintered Tool Substrate Lunch Session B - Conference room: Elegance 1 Session Chair: Ewa Dobruchowska INV3 Jolanta E. Klemberg-Sapieha, Department of Engineering Physics, Polytechnique Montreal, Montreal, Canada, Multifunctional Protective Coatings for Harsh Environments INV4 Grzegorz Greczyński, Department of Physics, Chemistry and Biology, Linköping University (SE), Synchronized metal-ion irradiation as a way to control growth of transitionmetal nitride alloy films during hybrid HiPIMS/magnetron co-sputtering O7 Wojciech Gajewski, Krzysztof Ruda, Piotr Różański, Paweł Lesiuk, Paweł Ozimek, From DC to High Power Impulse Magnetron Sputtering: A Review of Critical Factors Enabling Industrial Application for Decorative and Hard Coatings Deposition O8 K. Zdunek, R. Chodun, B. Wicher, K. Nowakowska-Langier, S. Okrasa, Hydrogen-Free DLC Coatings Deposited by HiP GIMS Coffee break O9 A. V. Tumarkin, A. V. Kaziev, Spatial Distributions of Plasma Parameters in a DC Magnetron Discharge with Liquid Cu Target O10 P. Calta, P. Šutta, R. Medlín, M. Netrvalová, Impact of Sublayer Thickness and Annealing on Si-Nanostructures Formation in -Si:H/ -SiN x :H Superlattices for Photovoltaics O11 Adam Pander, Keisuke Takano, Akimitsu Hatta, Hiroshi Furuta, Makoto Nakajima, Resonant Effects in Carbon Nanotube Forest Infrared Metamaterials O12 Krzysztof Rokosz, Tadeusz Hryniewicz, Raaen Steinar, Sofia Gaiaschi, Patrick Chapon, Winfried Malorny, Dudek Łukasz, Kornel Pietrzak, Characterization of Porous Phosphate Coatings Created on Titanium Grade 2 Enriched with Calcium, Magnesium, Zinc and Copper by Plasma Electrolytic Oxidation Conference Dinner sponsored by TEPRO SA WEDNESDAY November 29 Clausius Session Educational Programme Conference room: Elegance Chair: Witold Gulbiński Lecture1 Dr Adam Pander, Kochi University of Technology, Japan The wonderful world of carbon: carbon nanotubes as a material of the future Coffee/Sandwich break (for students) Lecture2 Prof. Marek Godlewski, Institute of Physics, Polish Academy of Sciences, Warsaw Industry exhibitors sesion Conference room: Elegance 2 Moderator: Bogdan Warcholiński Marek Danis, Oerlikon Balzers Coating Poland History of PVD coating technology in Poland TEPRO S.A. Denton Vacuum Edwards Vacuum EDVAC Linseis Messgeräte GmbH PANalytical B.V. SHIM-POL TRUMPF Hüttinger AMPERE POLSKA Sp. z o.o. AMP Sp. z o.o. How we can save our civilization? Coffee break

3 Session C - Conference room: Elegance 1 Session Chair: Yanwen Zhou 11:00 11:30 11:30 12: INV6 Jindrich Musil, University of West Bohemia, Plzen (CZ), Recent advances in hard nanocomposite coatings prepared by magnetron sputtering (CANCELLED) INV5 Ulf Jansson, Department of Chemistry, Ångström Laboratory, Uppsala University (SE), High Entropy Materials O13 R. Pietruszka, B.S. Witkowski, E. Zielony, K. Gwozdz, E. Placzek-Popko, M. Godlewski, New solar cells based on zinc oxide / silicon heterojunction O14 Andrey Kaziev, Cathode Sheath Processes in a Non-Sputtering Magnetron Discharge Lunch Session D - Conference room: Elegance 1 Session Chair: Witold Gulbiński INV7 Diego Martinez-Martinez, University of Minho, Physics Centre, Guimaraes (PT), TopoSEM: a novel tool to measure topography from SEM images in a simple way O15 Alexander Tikhomirov, Numerical Simulation of Vacuum Conditions for Designing Vacuum Systems of Heavy Ion Accelerators O16 - Md. Masud-Ur-Rashid, Andreas Archenti, Cornel Mihai Nicolescu, Process Parameter Optimization in a Reactive Dual Magnetron HIPIMS System by Design of Experiment Approach O17 Sebastian Fryska, Jolanta Baranowska, The Influence of the Substrate Preparation and the Plasma Ion Cleaning Step onto S Phase Coating Morphology Coffee break Poster Session Conference room Elegance 1 & 2 Chair: Witold Gulbinski Dinner THURSDAY November 30 Session E - Conference room: Elegance 1 Session Chair: Bogdan Warcholiński O18 K. Idczak, A. Próchnicka, E. Wachowicz, L. Markowski, M. C. Tringides, Growth of the Thin Zn Films on 4h-SiC(0001) Graphene O19 A. Bartnik, W. Skrzeczanowski, P. Wachulak, T. Fok, Ł. Węgrzyński, H. Fiedorowicz, R. Jarocki, J. Kostecki, M. Szczurek, Low Temperature Plasmas Induced Using Extreme Ultraviolet and Soft X-Ray Intense Pulses O20 S. Owczarek, K. Idczak, M. C. Tringides, L. Markowski, Ultra-Thin In Films on the Si(111)- ( 3 3)-Pb Reconstructed Surface O21 Adam Sarnecki, Paweł Adamski, Agata Komorowska, Marlena Nadziejko, Dariusz Moszyński, In-situ XPS Study of Cobalt-based Catalysts for Ammonia Synthesis the Reduction Process O22 Sandra Peglow, Marga-Martina Pohl, Volker Brüser, Plasma-Vapour-Deposition Synthesis of Au and Au-Ag Core-Shell Nanoparticle on Metal Oxide Semiconductors O23 - Joanna Piwowarczyk, Roman Jędrzejewski, Konrad Kwiatkowski, Jolanta Baranowska, Deposition of Polymer-Carbon Composites by Pulsed Eelectron Beam Technique Closure of the Symposium Coffee break / Sandwich break Departure of participants

4 P1 P2 P3 P4 P5 P6 P7 P8 P9 P10 P11 P12 P13 P14 P15 P16 List of poster V.V. Vasyliev, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strelnitskij, V. Zavaleyev, J. Walkowicz V.V. Vasylyev, А.S. Kuprin, А.А. Luchaninov, V.D. Ovcharenko, Е.N. Reshetnyak, V.Е. Strelnitskij, G.N. Tolmachova,V. Zavaleyev, J. Walkowicz Krzysztof Mars, Elżbieta Godlewska, Rafał Zybała Katarzyna Nowakowska-Langier, Sebastian Okrasa, Rafal Chodun, Grzegorz W. Strzelecki, Krystian Król, Roman Minikayev, Krzysztof Zdunek Marcin Adamiak, Monika Karoń C.I. da Silva Oliveira, C. Mansilla, D. Martinez- Martinez, L. Cunha, S. Carvalho Adam Gilewicz, Łukasz Szparaga, Katarzyna Mydłowska, Ewa Dobruchowska, Paweł Kochmański, Roman Jędrzejewski, Jerzy Ratajski Tomasz Suszko, Witold Gulbiński, Jerzy Morgiel, Grzegorz Greczynski, Ewa Dobruchowska, Piotr Dłużewski, Jun Lu, Lars Hultman Tomasz Suszko, Witold Gulbiński, Ewa Dobruchowska, Grzegorz Greczynski, Jerzy Morgiel V. Zavaleyev, M. Sawczak, E. Dobruchowska, J. Walkowicz, A. Kuprin, G.N. Tolmachova B. Warcholinski, A. Gilewicz, A.S. Kuprin, I.V. Kolodiy T. Kuznetsova, T. Zubar, V.Lapitskaya, S. Chizhik, A.S. Kuprin, G.N. Tolmachova, V.D. Ovcharenko, A. Gilewicz, O. Lupicka, B.Warcholinski B. Warcholinski, A. Gilewicz, A.S. Kuprin, G.N. Tolmachova, V.D. Ovcharenko, T.A. Kuznetsova, T.I. Zubar, A.L. Khudoley, S.A. Chizhik A.S. Kuprin, V.D. Ovcharenko, A. Gilewicz, G.N. Tolmachova, I.V. Kolodiy, R.L. Vasilenko, B. Warcholinski T.A.Kuznetsova, T.I. Zubar, V.A. Lapitskaya, S.A. Chizhik, A.S. Kuprin, V.D. Ovcharenko, A. Gilewicz, B. Warcholinski B. Warcholinski, T.A.Kuznetsova, A. Gilewicz, T.I. Zubar, V.A. Lapitskaya, S. A. Chizhik, A.I. Komarov, V.I. Komarova, A.S. Kuprin, V.D. Ovcharenko, V.S. Goltvyanitsa P17 A. Śliwa, W. Kwaśny, M. Bonek P18 M. Pancielejko, V. Zavaleyev P19 P20 A.G. Chmielewski, Y.Sun, A. Pawelec, E. Zwolińska, S. Witman-Zając Rafał Chodun, Katarzyna Nowakowska Langier, Piotr Konarski, Sebastian Okrasa, Krzysztof Zdunek Influence of Pulse Bias Potential Parameters on the Structure and Mechanical Characteristics of TiN Coatings Prepared by the PIII&D Technique Structure and Properties of Vacuum-Arc Coatings based on High Entropy Alloys Sn-Se Layers Prepared by Pulsed Magnetron Sputtering Study of Properties of Copper Nitride Layers obtained by Pulsed Magnetron Sputtering Picosecond Laser Surface Micro-Texturing for the Modification of PVD Coatings Synthesis and Characterization of Ta-Zr-O Films Prepared by Magnetron Sputtering Study on the Influence of the ZrC Coating Structure on Mechanical and Anticorrosive Properties Amorphous FeCrNi/a-C:H Coatings with Self- Organized Nanotubular Structure Mechanical and Tribological Properties of CoCrMo/a-C:H Coatings Deposited by Magnetron Sputtering of ISO Medical Alloy Modification of the Properties of Titanium Oxide Thin Films Using Laser Irradiation Structure and Properties of CrN Coatings Formed using Cathodic Arc Evaporation in Stationary System Microfriction of Cr-O-N Coatings Characterized by Atomic Force Microscopy Mechanical and Tribological Properties of Cr-O-N Coatings Deposited in Vacuum Arc Plasma Fluxes Structure and Properties of Vacuum Arc Cr-V-N Coatings Surface Properties and Morphology of Zr(O)N Coatings with Different Oxygen Concentration Deposited using Cathodic Arc Evaporation Morphology and Structure of Zr-Si-N Coatings Deposited at Different Substrate Bias Voltages Determination of Temperature Distribution during Laser Alloying Process with the use of FEM Analysis Properties of DLC/Cr Coatings Deposited on Biomedical Stainless Steel Overview of Reduction of SO 2 and NO x using Wet Scrubber and Hybrid System Characteristic State of Substrate and Coatings Interface Formed by Impulse Plasma Deposition Method

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